Vacuum Pressure Sensor | Pirani Type Vacuum Pressure Sensor for High Vacuum Measurement
This is a vacuum pressure sensor that can be cleaned with low voltage operation. It is suitable for high vacuum measurement applications in semiconductor manufacturing equipment.
The MEMS Pirani vacuum sensor "PVC1000 series" achieves miniaturization of vacuum measurement methods while realizing ultra-low power consumption, long lifespan, minimal maintenance, and low cost. Measurement range: 10^-3 to 30 mmHg with high precision of ±5% in the range below 5 mmHg Humidity: 0~100% (non-condensing) Temperature compensation range: -40 to 125℃ Durability pressure: 27.5Bar
- 企業：オールデバイス
- 価格：Other
